Bias power supply

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Bias power supply

Product brief introduction

Every magnetron sputtering process can be supported by bias power supply: Bias TruPlasma 3000 / 4000 bias power series is a wide range of applications, advanced DC bias power supply. Whether for in materials processing, dry moment and bias of the film dep

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Trulasma Bias 3000 Bias power supply series is for magnetron sputtering plating process using more power, two work modes: for substrate etching process of 1200 v high voltage mode, as well as for bias film deposition process of 300 V low voltage mode support.

• Fast arc management system
• Advanced monitoring and control system to ensure high stability and good reproducibility

TruPlasma Bias 4000 Bias power series can optimize your pulse DC plasma technology. The device can be divided into two modes: 1200 V high pressure mode for substrate etching process, and 300 V low pressure mode for supporting the bias layer deposition process.

• Fast arc management system
• Advanced monitoring and control system to ensure high stability and good reproducibility

Features：
• Unique performance and control design, and high stability
• Two seperated voltage modules
• Residual arc energy is the lowest level of similar products
• Self induction compensation for output cable
• Rear interface

Customer benifit：
• Production process stability
• One device with various applications
• High processing stability and good film quality
• Residual energy of neutral cable
• Best device connection settings

Product	Power supply	Output Voltage	Output Current	Cooling method	Power
	[kW]	High/low Pressure Mode	High/low Pressure Mode		[V]
		Mode	Mode
		[V]	[A]
TruPlasma Bias 3003	3	1200 / 300	2,5 / 10	Air cooling	(±10%) 400
TruPlasma Bias 3012	12	1200 / 300	10 / 40	Air cooling	(±10%) 400
TruPlasma Bias 3018	18	1200 / 300	15 / 60	Air cooling	(±10%) 400
TruPlasma Bias 3026	26	1200 / 300	22 / 87	Air cooling	(±10%) 400
TruPlasma Bias 4012	12	1200 / 300	10 / 40	Air cooling	(±10%) 400
TruPlasma Bias 4018	18	1200 / 300	15 / 60	Air cooling	(±10%) 400
TruPlasma Bias 4026	26	1200 / 300	22 / 87	Air cooling	(±10%) 400

Bias TruPlasma 3000 bias power series is a wide range of applications, advanced technology of DC bias power supply, there are two kinds of pure DC and pulse DC specifications. The power series has two types: the maximum 1200 V of the high voltage mode and the maximum 300 V low voltage mode. These two modes are particularly suitable for optical and metal coating processes, such as semiconductor technology or hard coating, as well as other types of voltage and current requirements of the process.
Bias TruPlasma 4000 bias power supply series is a widely used, advanced technology of DC bias power supply, pulse frequency of the highest 100kHz, can achieve continuous bias output. The power series has two types: the maximum 1200 V of the high voltage mode and the maximum 300 V low voltage mode. These two modes are particularly suitable for optical and metal coating processes, such as semiconductor technology or hard coating, as well as other types of voltage and current requirements of the process.

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