The device combine magnetron sputtering and vacuum evaporation coating technology in one chamber,not only use the magnetron sputtering cathode glow discharge technique to ionize and deposit the molecule(target) on the base material(PVD), as well as the resistance heating technique in the vacuum to melt and vaporize the metal wire to deposit on substrate. Increasing the use and flexibility of the equipment.The device is used in mobile phones and other plastic shell surface metallization, used in non-conductive film and electromagnetic shielding film deposition.
The equipment integrates the plasma treatment, high-end cathode magnetron sputtering, resistance evaporation coating technology.It has the feactures of high deposition rate,strong adhesion,smooth and shinning coating,good uniformity etc.Machine can be full automatic control,large loading capacity,reliable running,high qualitified,low cost and environment protective.It is mainly applied to computer shell,mobile shell,household appliances etc industries.It can deposit metal film,alloy film,composite film,transparent(translucent)film,non-conductive film and electromagnetic film etc.
| Chamber size | Φ800×1200 | Φ1600×1800 |
| Power | 68KW | 115KW |
| Power type | magnetron power、arc power、Pulse bias power supply | |
| Sputtering and electrode structure | Cylindrical magnetron target, flat rectangular target, twin target evaporated electrode | |
| Vacuum chamber structure | Vertical double door, vertical single door, horizontal single door, rear exhaust system | |
| Ultimate vacuum | 10-4Pa | |
| Vacuum system | Diffusion pump/Molecular pump +Roots pump +Mechanical pump +Holding pump | |
| Pumping time | Pump from atmosphere to 5.0×10-2Pa≤7min | |
| Workpiece motion mode | Public rotation Frequency control: 2-20r/minute | |
| control mode | Manual/Automatic all in one mode, Touch screen + PLC | |
| Remark | We can design the dimension of the equipment according to customer’s special technique requirement. | |
It is mainly applied to computer shell,mobile shell,household appliances etc industries.It can deposit metal film,alloy film,composite film,transparent(translucent)film,non-conductive film and electromagnetic film etc.
