This production line has seven vacuum chambers in total，2 pairs MF twins Si target which adopts PCU04 closed loop control. 10 pairs cylinder AZO target to achieve high-quality transparent conductor AZO film.
This machine is widely applied in the solar cells. Transparent conductive film can be used as antireflection layer and transparent electrode, improve the solar conversion efficiency. Use CIGS thin film to alternate the traditional thin film, to reduce cos
LOW-E magnetron sputtering coating production line, mainly used for single and double low-e glass coating, and steel single, double silver Low-E glass coating.
